Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1994-04-25
1996-02-06
Rosenberger, Richard A.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
356363, G01B 1100
Patent
active
054899869
ABSTRACT:
In a position detecting apparatus having an object optical system, two beams are generated for irradiating a diffraction grating formed on an object from two directions at a predetermined intersect angle for forming an interference fringe, the beams passing through a pupil plane of the object optical system spaced apart a predetermined distance from each other. An opto-electric detector receives diffracted light from the grating via the object optical system and outputs a detection signal, and the position of the object is determined on the basis of the detection signal. An adjustable optical member provided in a light path between an optical source and the object changes incident angles at which the two beams are incident on the grating while keeping the intersect angle between the two beams substantially constant.
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Komatsu Kouichiro
Magome Nobutaka
Mizutani Hideo
Ota Kazuya
Hantis K. P.
Nikon Corporation
Rosenberger Richard A.
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