Position correcting apparatus, vacuum processing equipment...

Material or article handling – Article reorienting device

Reexamination Certificate

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Details

C414S217000, C414S757000, C414S784000, C414S816000, C414S936000

Reexamination Certificate

active

07918640

ABSTRACT:
A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.

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