Position controlling device

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Plural variables

Reexamination Certificate

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Details

C318S560000, C318S567000, C700S302000

Reexamination Certificate

active

08082048

ABSTRACT:
A structure is provided in which a thrust feed forward structure for operating a structure to be driven without vibration and a control structure which simultaneously compensates for positional deviation caused by the thrust feed forward structure and positional deviation caused by a base displacement are included in a position controlling device (3). Alternatively, a structure is provided in which an acceleration and deceleration process for realizing response of the position of the structure to be driven and base displacement without vibration and a control structure which determines a feed forward amount with respect to a position instruction value after the acceleration and deceleration process are provided to the position controlling device.

REFERENCES:
patent: 5432422 (1995-07-01), Nagano et al.
patent: 6184644 (2001-02-01), Eguchi
patent: 6725129 (2004-04-01), Kito
patent: 6861816 (2005-03-01), Eguchi
patent: 7366576 (2008-04-01), Tanahashi et al.
patent: 2003/0201746 (2003-10-01), Eguchi
patent: 2005/0033460 (2005-02-01), Tanahashi et al.
patent: 2007-25961 (2007-02-01), None
patent: 2007025961 (2007-02-01), None
A. Yamamoto et al. “High-Speed Positioning Control for Linear Motor Driving Table Without Base Vibration” ; The Japan Society for Precision Engineering, vol. 70, No. 5, 2004; pp. 645-650 (11 pages).
esp@cenet patent abstract for Japanese Publication No. 2007025961, Publication date Feb. 1, 2007 (1 page).

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