Position control system

Details Position control system Position control system

1995-05-24

1996-10-22

Ro, Bentsu

Electricity: motive power systems

Positional servo systems

With compensating features

318610, 318652, 310311, H01L 2168

Patent

active

055680321

ABSTRACT:
A position control system which includes a plurality of actuators for moving an object, a plurality of sensors for detecting the state of the object, a first circuit for extracting a state signal, in each of different kinetic modes related to the object, from outputs of the sensors, a compensating circuit for compensating for the state signals in the respective kinetic modes, a second circuit for distributing an output of the compensating circuit and for providing drive signals for the actuators in accordance therewith, and a driver for driving the actuators in response to the drive signals.

REFERENCES:
patent: 4928030 (1990-05-01), Culp
patent: 5079492 (1992-01-01), Takagi
patent: 5196745 (1993-03-01), Trumper
patent: 5262707 (1993-11-01), Okazaki et al.

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