Position control for scanning probe spectroscopy

Details Position control for scanning probe spectroscopy Position control for scanning probe spectroscopy

2007-06-15

2009-08-04

Vanore, David A (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

Calibration aspect, e.g., calibration of probes

C850S001000, C850S002000, C850S003000, C850S004000, C850S005000

Reexamination Certificate

active

07569077

ABSTRACT:
A method of position control for scanning probe spectroscopy of a specimen. Probe positional error is determined by comparing images generated from a sequence of scans to identify differences between positions of at least a portion of a reference characteristic of the specimen in the images. A probe is moved to a target location for spectroscopic analysis, as a function of the determined probe positional error.

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PCT Int'l App. No. PCT/US2008/066949 Int'l Search Report and Written Opinion Dated: Dec. 17, 2008.

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