Electricity: motive power systems – Positional servo systems – Multiple mode systems
Patent
1998-03-20
1999-12-28
Shoop, Jr., William M.
Electricity: motive power systems
Positional servo systems
Multiple mode systems
G05B 1118
Patent
active
060086106
ABSTRACT:
A position control apparatus for synchronously controlling the movement of fine stages in a high-precision scanning positioning instrument. The position control apparatus uses actuators to adjust the fine stages with six degrees of freedom. By adjusting the fine stages, any synchronous errors between the fine stages during scanning may be dynamically corrected. Further, the fine stages may be adjusted during periods of acceleration and deceleration to reduce the settling time and consequently increasing throughput. Encoders directly attached to the actuators produce signals that are used in a velocity feedback loop. The locations of the fine stages are measured by interferometers. The position control apparatus uses a position control circuit to control the actuators to compensate for synchronous error.
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Saiki Kazuaki
Yuan Bausan
Duda Rina I.
Halbert Michael J.
Nikon Corporation
Shoop Jr. William M.
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