Position calibrating method for optical measuring apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

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Details

356399, 356400, G01B 1100

Patent

active

060671653

ABSTRACT:
In an optical measuring apparatus so structured as to hold a CCD camera and a laser displacement gauge so that they can be three-dimensionally driven at the same time on a stage, a jig including two straight, non-parallel line segments which can be measured by the CCD camera and the laser displacement gauge in the projection plane along the Z-axis direction is mounted on the stage; the straight line segments are measured in the projection plane by the CCD camera and the laser displacement gauge to obtain formulas of these segments; the obtained formulas are subjected to the arithmetic operation to calculate an offset value of the X and Y plane coordinate centers between the CCD camera and the laser displacement gauge; and the offset value is used as position calibration data of the CCD camera and the laser displacement gauge to perform position calibration of the measurement data.

REFERENCES:
patent: 4920273 (1990-04-01), Sacks et al.
patent: 4982504 (1991-01-01), Soderberg et al.
patent: 5187874 (1993-02-01), Takahashi et al.
patent: 5325180 (1994-06-01), Chappelow et al.

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