Portable particle detector assembly

Details Portable particle detector assembly Portable particle detector assembly

1992-03-26

1993-10-19

Britton, Howard W.

Facsimile and static presentation processing

Facsimile

Specific signal processing circuitry

250574, 356337, 358207, H04N 718

Patent

active

052550893

ABSTRACT:
A portable particle detector assembly for detecting particle contamination in the reaction chamber of a plasma processing tool used in semiconductor manufacture. The detector is comprised of a scanner assembly for providing a scanned laser beam and a video camera placed opposite the scanner assembly for monitoring light scattered by particles within the volume of the reaction chamber.

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