Radiant energy – Ionic separation or analysis – With sample supply means
Patent
1993-09-17
1995-06-20
Berman, Jack I.
Radiant energy
Ionic separation or analysis
With sample supply means
250289, H01J 4904, H01J 4924
Patent
active
054263000
ABSTRACT:
A gas analyzing system that includes a vacuum chamber containing a mass spectrometer and a sampling device for introducing a gas sample into the chamber. A sorption pump is operatively connected to the chamber which is capable of maintaining the chamber at a high vacuum. The pump includes a diffusion barrier that provides smooth pumping characteristics and repeatable short term system behavior when sample pulses are introduced into the system.
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Adams Gregory
DeLuca Stephan J.
Voss Gunter
Berman Jack I.
Leybold Inficon Inc.
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