Coating apparatus – Gas or vapor deposition – With treating means
Patent
1997-12-18
2000-02-29
Tentoni, Leo B.
Coating apparatus
Gas or vapor deposition
With treating means
165 68, 165 803, 165 87, C23C 1646
Patent
active
060304618
ABSTRACT:
A portable cooling system for use with a semiconductor fabrication system having a heating block is provided. A portable cooling system, consistent with one embodiment of the invention, includes a support structure removably mountable on part of the semiconductor fabrication system and near the heating block of the fabrication system. Disposed on the support structure are one or more fans for blowing air over the heating block. In one embodiment, the support structure includes a plate and a plurality of legs which extend down from the plate for mounting on the heating block. In another embodiment, the support structure includes a plate and means for mounting the plate on one or more walls of the semiconductor fabrication system. The portable cooling system facilitates the cooling of the heating block of the fabrication system and can, for example, significantly reduce the time spent cleaning the semiconductor fabrication system as compared to conventional cleaning techniques.
REFERENCES:
patent: 5097890 (1992-03-01), Nakao
patent: 5636103 (1997-06-01), Bushner
Advanced Micro Devices , Inc.
Tentoni Leo B.
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