Radiant energy – Ionic separation or analysis
Reexamination Certificate
2007-04-23
2011-11-29
Maskell, Michael (Department: 2881)
Radiant energy
Ionic separation or analysis
C250S282000, C250S288000
Reexamination Certificate
active
08067727
ABSTRACT:
In a surface inspection system for detecting particles on a surface, a light source mounted to illuminate the surface provides multiple wavelength ranges of electromagnetic radiation. An optical detector produces an image of the surface. An optical signal is produced indicative of returned electromagnetic radiation at each of a plurality of the multiple wavelength ranges from a field of view on the surface. A processor operating on the optical signals resolves presence of a contaminant as a function of the optical signals, and produces a contaminant signal responsive to presence of a contaminant. A heating means positioned to evolve contaminants from the surface is responsively coupled to be activated in response to a contaminant signal. The multiple wavelength ranges comprise ultraviolet, visible, and infrared wavelengths. The processor comprises means to perform false color contrast stretching.
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Edwards Carl S.
Featherby Michael
Zhu Huizhen
Cogan Robert P.
Continuum Law
Maskell Michael
Space Micro Inc.
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