Valves and valve actuation – Electrically actuated valve – Remote or follow-up control system for electrical actuator
Reexamination Certificate
2006-07-11
2006-07-11
Jacyna, J. Casimer (Department: 3751)
Valves and valve actuation
Electrically actuated valve
Remote or follow-up control system for electrical actuator
C251S318000, C251S905000
Reexamination Certificate
active
07073771
ABSTRACT:
A valve assembly for controlling the flow of a predetermined fluid, including a tube having an open end forming an outlet port, and wherein the tube is made of a material that is porous with respect to the predetermined fluid, an outer wall forming a fluid chamber coaxially surrounding the porous tube and including an inlet port, and a valve member made of non-porous material received for sliding movement within the porous tube. Sliding movement of the valve member within the tube and towards the open end of the tube reduces the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly, while sliding movement of the valve member within the tube and away from the open end of the tube increases the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly.
REFERENCES:
patent: 1668165 (1928-05-01), McCann
patent: 2466304 (1949-04-01), Cooney
patent: 4572783 (1986-02-01), Watson
patent: 4796854 (1989-01-01), Ewing
patent: 4925153 (1990-05-01), Romer
patent: 5273561 (1993-12-01), Zeren
patent: 5533545 (1996-07-01), Robinson
© 2000 MKS Instruments, Inc., “Pressure-Based Mass Flo® Controller For Ion Implant Applications Type 1640, ” Bulletin 1640-4/00.
© 2000 MKS Instruments, Inc., “Metal-Sealed Mass-Flo® Controller Type 1479A, ” Bulletin 1479A-5/00.
PCT International Search Report (3 sheets).
Written Opinion of the International Searching Authority (3 sheets).
Besen Matthew
Collins, Jr. Ronald W.
Shajii Ali
Jacyna J. Casimer
MKS Instruments Inc.
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