Porous thermal isolation mesas for hybrid uncooled infrared dete

Details Porous thermal isolation mesas for hybrid uncooled infrared dete Porous thermal isolation mesas for hybrid uncooled infrared dete

1995-06-07

1996-07-16

Ngo, Ngan V.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257436, 257446, 257448, 257459, 257466, 257467, H01L 3100, H01L 31058

Patent

active

055369650

ABSTRACT:
Thermal isolation mesas 36 comprising a porous material 64 are used to thermally insulate sensing integrated circuitry 44 from pixels 34 of an uncooled IR detector hybrid system 30. The porous material 64 is preferably a silicon-dioxide xerogel. The mesas 36 may also comprise a protective film 66.

REFERENCES:
patent: 4080532 (1978-03-01), Hopper
patent: 4740824 (1988-04-01), Yano et al.
patent: 4745278 (1988-05-01), Hanson
patent: 4792681 (1988-12-01), Hanson
patent: 5449944 (1995-09-01), Sudo et al.
Hanson, et al., "Low-Cost Uncooled Focal Plane Array Technology", Presented at Detector IRIS Meeting, Bedford, MA: by Defense Systems and Electronics Group; Aug. 17, 1993, pp. 1-9.

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