Porous silicon composite structure as large filtration array

Details Porous silicon composite structure as large filtration array Porous silicon composite structure as large filtration array

2007-10-16

2007-10-16

Fortuna, Ana (Department: 1723)

Liquid purification or separation

Filter

Material

C210S490000, C096S004000, C096S006000

Reexamination Certificate

active

10697077

ABSTRACT:
A novel asymmetric filter membrane, and process for making is disclosed in several exemplary versions. The membrane structure is physically robust and suitable for use in a wide variety of applications. The support membrane is may be comprised of material such as a porous silicon or a silicon oxide, and the separation membrane may be comprised of material such as a polymer, zeolite film, or silicon oxide. The process relies on steps adapted from the microelectronics industry.

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