Porous silicon carbide (SiC) semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Specified wide band gap semiconductor material other than... – Diamond or silicon carbide

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257 21, 257 22, 257 35, 257 46, 257 51, 437 87, 437 90, H01L 2900, H01L 2904, H01L 2120

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052987671

ABSTRACT:
A semiconductor device employs at least one layer of semiconducting porous silicon carbide (SiC). The porous SiC layer has a monocrystalline structure wherein the pore sizes, shapes, and spacing are determined by the processing conditions. In one embodiment, the semiconductor device is a p-n junction diode in which a layer of n-type SiC is positioned on a p-type layer of SiC, with the p-type layer positioned on a layer of silicon dioxide. Because of the UV luminescent properties of the semiconducting porous SiC layer, it may also be utilized for other devices such as LEDs and optoelectronic devices.

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Nishino et al., "Blue-Emitting Diodes of 6H-SiC Prepared by CVD", Japanese Journal of Applied Physics, vol. 19, No. 7, pp. L353-L356, Jul. 1980.

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