Porous silicon and method of preparing the same

Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Composite having voids in a component

Reexamination Certificate

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C428S309900, C428S212000, C428S446000

Reexamination Certificate

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07972687

ABSTRACT:
The present invention relates to a porous silicon material comprising one or more pore parts which include a first pore, a second pore, and a third pore. The first pore is formed in an upper side of the silicon. The second pore is formed in a lower side of the first pore and has a diameter that is larger or smaller than a diameter of the first pore. The third pore is formed in a lower side of the second pore and has a diameter that is identical or similar to the diameter of the first pore. The pore part having a double structure is formed in a silicon material. Since different electronic materials can be implanted into different pores of the porous silicon, it is easy to form interfaces of the implanted electronic materials.

REFERENCES:
patent: 2004/0146705 (2004-07-01), Den et al.
patent: 2006/0234391 (2006-10-01), Weiss et al.
patent: 1998-032008 (1998-07-01), None
patent: WO 95/16280 (1995-06-01), None

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