Porous semiconductor-based optical interferometric sensor

Optics: measuring and testing – By light interference – Having partially reflecting plates in series

Reexamination Certificate

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Reexamination Certificate

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06897965

ABSTRACT:
The measurement of the wavelength shifts in the reflectometric interference spectra of a porous semiconductor substrate such as silicon, make possible the highly sensitive detection, identification and quantification of small analyte molecules. The sensor of the subject invention is effective in detecting multiple layers of biomolecular interactions, termed “cascade sensing”, including sensitive detection of small molecule recognition events that take place relatively far from the semiconductor surface.

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