Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2005-05-17
2005-05-17
Nelms, David (Department: 2818)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C438S049000
Reexamination Certificate
active
06893892
ABSTRACT:
A sensor is disclosed. A representative sensor includes a silicon substrate having a porous silicon region. A portion of the porous silicon region has a front contact is disposed thereon. The contact resistance between the porous silicon region and the front contact is between about 10 ohms and 100 ohms.
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Gole James L.
Hesketh Peter J.
Seals Lenward T.
Georgia Tech Research Corp.
Le Thao P.
Thomas Kayden Horstemeyer & Risley LLP
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