Porous ceramic thin film and process for preparing the same

Details Porous ceramic thin film and process for preparing the same Porous ceramic thin film and process for preparing the same

1984-05-11

1986-04-22

Dixon, Jr., William R.

Compositions: ceramic

Ceramic compositions

Pore-forming

501 1, 501 12, 501 39, 501 83, 428469, 427247, 427373, 4273882, C04B 3800, B32B 700

Patent

active

045842809

ABSTRACT:
A process for preparing a porous ceramic thin film which comprises applying an anhydrous solution containing an organometallic compound and a multifunctional organic compound to a substrate, and thermally decomposing the compounds. The porous ceramic thin film prepared by the process has pores of not more than 10 .mu.m in pore size, and is useable as for materials of various sensors.

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patent: 3261894 (1966-07-01), Seidl
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patent: 3597252 (1971-08-01), Schroder et al.
patent: 3782982 (1974-01-01), Pierson et al.
patent: 3850665 (1974-11-01), Plumat et al.
patent: 4332907 (1982-06-01), Vieli
patent: 4397338 (1983-08-01), Cunningham
patent: 4397666 (1983-08-01), Mishima et al.
patent: 4472512 (1984-09-01), Lane et al.

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