Porcelain-coated antenna for radio-frequency driven plasma sourc

Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond

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Details

428432, 428450, 428467, 428469, B32B 900

Patent

active

055872263

ABSTRACT:
A new porcelain-enamel coated antenna creates a clean plasma for volume or surface-conversion ion sources. The porcelain-enamel coating is hard, electrically insulating, long lasting, non fragile, and resistant to puncture by high energy ions in the plasma. Plasma and ion production using the porcelain enamel coated antenna is uncontaminated with filament or extraneous metal ion because the porcelain does not evaporate and is not sputtered into the plasma during operation.
Ion beams produced using the new porcelain-enamel coated antenna are useful in ion implantation, high energy accelerators, negative, positive, or neutral beam applications, fusion, and treatment of chemical or radioactive waste for disposal. For ion implantation, the appropriate species ion beam generated with the inventive antenna will penetrate large or small, irregularly shaped conducting objects with a narrow implantation profile.

REFERENCES:
patent: 4725449 (1988-02-01), Ehlers et al.
patent: 5272414 (1993-12-01), Iwanaga
Engineering Mat'ls Handbook vol. 4; Ceramics & Glasses.
Encyclopedia of Mat'l Science & Engineering vol. 5.
Mat'l Handbook 12th Edition.
Hackh's Chemical Dictionary 4th Edition.

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