Polyurethane composition with (meth)acrylate end groups useful i

Details Polyurethane composition with (meth)acrylate end groups useful i Polyurethane composition with (meth)acrylate end groups useful i

1997-01-29

1999-10-12

Codd, Bernard

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

216 89, 522 96, 451526, 451 41, B24B 100

Patent

active

059654600

ABSTRACT:
Particular polyurethane photopolymers are disclosed as materials of construction in producing improved polishing pads. The polyurethane photopolymers are formed from a polyurethane prepolymer prepared from the reaction products of a first reactant selected from the group consisting of polyesters, polyethers, polybutadienes and mixtures of the foregoing with diisocyanates, further reacted with acrylates and/or methacrylates.

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