Polysiloxane compounds and positive resist compositions

Details Polysiloxane compounds and positive resist compositions Polysiloxane compounds and positive resist compositions

1996-09-24

1997-11-25

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Compositions to be polymerized by wave energy wherein said...

522 63, 522 65, 522 15, 522148, 522172, 528 21, 528 25, 528 34, 528 42, 528 43, C08J 328

Patent

active

056913966

ABSTRACT:
The invention provides a novel polysiloxane compound, typically polyhydroxybenzylsilsesquioxane, having some hydroxyl groups replaced by acetal groups and optionally acid labile groups. The polysiloxane compound is useful as an alkali soluble polymer for positive resist material.

REFERENCES:
patent: 5338818 (1994-08-01), Brunsvold et al.
patent: 5350485 (1994-09-01), Shiraishi et al.

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