Polysilicon optical router having rotor

Details Polysilicon optical router having rotor Polysilicon optical router having rotor

2005-08-02

2005-08-02

Bovernick, Rodney (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S016000, C385S025000, C385S026000, C310S0400MM

Reexamination Certificate

active

06925224

ABSTRACT:
An optical router comprises a substantially planar substrate, a stator fixed to and projecting from an upper surface of the substrate, and a rotor surrounding the stator so as to be rotatable about the stator. At least one optical guiding component is formed in or on the rotor. A substantially planar layer is provided on the substrate surrounding the rotor and has a plurality of optical waveguides formed therein, the waveguides opening at least one end onto a space surrounding the rotor. The stator rotor, and planar layer are formed on the substrate by a series of deposition and etching steps such that the rotor may be rotated about the stator so as to align the optical guiding component with one or more of the waveguide openings.

REFERENCES:
patent: 5252881 (1993-10-01), Muller et al.
patent: 5278692 (1994-01-01), Delapierre
patent: 6028552 (2000-02-01), Shuguang
patent: 6360424 (2002-03-01), Mehregany et al.
patent: 6404943 (2002-06-01), Wang
patent: 62112116 (1987-05-01), None
patent: 05241084 (1993-09-01), None
Yassen, A.A. et al., “A Rotary Electrostatic Micromotor 1×8 Optical Switch,”IEEE Journal of Selected Topics in Quantum Electronics, vol. 5, No. 1, Jan./Feb. 1999.
Krygowski, T.W. et al., “A Low-Voltage Rotary Actuator Fabricated Using a Five-Level Polysilicon Surface Micromachining Technology,”IEEE(1999).

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