Polysilicon fuse that provides an open current path when program

Details Polysilicon fuse that provides an open current path when program Polysilicon fuse that provides an open current path when program

1999-08-18

2000-12-26

Carroll, J.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

H01L 2900

Patent

active

061664219

ABSTRACT:
The contamination introduced into a conventional fuse via the window opening of the fuse is eliminated by forming a fuse with a cavity. When the fuse is programmed by passing a current through the fuse which is sufficient to heat up the fuse material, the heated fuse material flows up into the cavity, thereby providing an open current path.

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M. Alavi et al., "A PROM Element Based on Salicide Agglomeration of Poly Fuses in a CMOS Logic Process" IEDM 9 7 (Dec. 1997) pp. 855-858.

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