Radiation imagery chemistry: process – composition – or product th – Post imaging processing – Physical developing
Patent
1990-07-05
1992-05-05
Hille, Rolf
Radiation imagery chemistry: process, composition, or product th
Post imaging processing
Physical developing
357 2, 357 4, 357 59, 430319, H01L 2978
Patent
active
051112604
ABSTRACT:
Field effect transistors in which the channel region is made of thin highly doped polysilicon which is preferably also hydrogen passivated.
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Malhi Satwinder
Shah Rajiv
Comfort James T.
Hille Rolf
Loke Steven
Merrett N. Rhys
Sharp Melvin
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