Polysilicon feed-through fluid drop ejector

Details Polysilicon feed-through fluid drop ejector Polysilicon feed-through fluid drop ejector

2005-06-14

2005-06-14

Gordon, Raquel Yvette (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

Reexamination Certificate

active

06905196

ABSTRACT:
A fluid ejector includes a fluid channel having a resistive heater and terminating in a nozzle, a common bus formed transverse to the fluid channel and between the resistive heater and the nozzle, a connection line laterally adjacent to the fluid channel, and a connection structure for electrically connecting the common bus with the resistive heater and the connection line, the connection structure including a first set of one or more layers for electrical connection and a second set of one or more layers for covering the common bus and connection line. The first set of one or more layers includes a doped polysilicon layer on or overlaid by an optional tantalum-silicide layer. The second set of one or more layers includes a nitride layer on or overlaid by a tantalum layer.

REFERENCES:
patent: 6227657 (2001-05-01), Raisanen et al.
patent: 6315384 (2001-11-01), Ramaswami et al.
patent: 6565762 (2003-05-01), Silverbrook

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