Polysilazane, method of synthesizing polysilazane,...

Details Polysilazane, method of synthesizing polysilazane,... Polysilazane, method of synthesizing polysilazane,...

2011-08-02

2011-08-02

Lindsay, Jr., Walter L (Department: 2812)

Semiconductor device manufacturing: process

Having organic semiconductive component

C257SE51024

Reexamination Certificate

active

07989257

ABSTRACT:
Disclosed are polysilazane, a method of synthesizing the polysilazane, a composition for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using the composition. The polysilazane is synthesized through a reaction, under a catalyst, between dichlorosilane, trichlorosilane, and ammonia added in a reaction solvent as a reactant. In this instance, a polystyrene conversion weight average molecular weight of the polysilazane is about 2,000 to 30,000.

REFERENCES:
patent: 2008/0234163 (2008-09-01), Shimizu et al.
John P. Dismukes, Chemical Synthesis of Microporous Nonoxides Cermaics from Polysilazanes, Chemical Material vol. 9, 1997 pp. 699-706.

Affiliated with

Also associated with

Rating

Polysilazane, method of synthesizing polysilazane,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polysilazane, method of synthesizing polysilazane,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polysilazane, method of synthesizing polysilazane,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2633270