Polysilane thin films for directly patternable waveguides

Details Polysilane thin films for directly patternable waveguides Polysilane thin films for directly patternable waveguides

2007-03-13

2007-03-13

Boutsikaris, Leonidas (Department: 2872)

Optical waveguides

Planar optical waveguide

C385S130000, C385S131000, C385S132000

Reexamination Certificate

active

10410061

ABSTRACT:
A waveguide structure includes a substrate. A layer of high index material includes polysilane, which is patterned using a UV light source to form a waveguide.

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