Polyoxometalate compositions and methods

Details Polyoxometalate compositions and methods Polyoxometalate compositions and methods

2006-09-11

2011-11-15

Lee, Katarzyna Wyrozebski (Department: 1747)

Abrasive tool making process, material, or composition

With synthetic resin

C051S309000, C428S403000, C428S404000, C428S407000, C524S406000, C524S413000

Reexamination Certificate

active

08057561

ABSTRACT:
The invention provides an isolated, particulate polyoxometalate complex comprising a water-soluble cationic polymer and a polyoxometalate compound ionically bound to the cationic polymer. The polyoxometalate compound can be an isopolyoxometalate compound, such as an isopolytungstate, or a heteropolyoxometalate compound. The invention further provides a chemical-mechanical polishing composition comprising a preformed polyoxometalate abrasive, as well as a method of chemically-mechanically polishing a substrate therewith.

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