Polyorganosiloxane with chloromethyl groups

Details Polyorganosiloxane with chloromethyl groups Polyorganosiloxane with chloromethyl groups

1989-11-13

1991-04-30

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 36, 528 39, 556455, 556462, 556488, C08G 7724

Patent

active

050119010

ABSTRACT:
Polyorganosiloxane which are useful as resist materials for use in microprocesses such as large scale integration device fabrication are those of the formula ##STR1## where R.sup.1 is a monovalent hydrocarbon group having 1 to 6 carbon atoms; R.sup.2 is a hydrogen atom or a monovalent hydrocarbon group having 1 to 6 carbon atoms; x and z are positive numbers; y is zero or a positive number; and x, y, and z have values such that their ratios are 0.3.ltoreq.(x+y)/z.ltoreq.4; and zero .ltoreq.y/x.ltoreq.100. The polyorganosiloxanes can be prepared by cohydrolysis or condensation reactions of hydrolyzable group-containing organosilanes or disiloxanes with tetrafunctional hydrolyzable silanes.

REFERENCES:
Denki Kenkyusho Kunkyu Jitsuyoka Hokoku, vol. 33, No. 9, p. 77 (1984).
Denshi Tsushin Gakkai Gijutsu Kenkyu Hokoku-sho, vol. 84, No. 291, p. 27 (1984).

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