Polymerization reactor

Details Polymerization reactor Polymerization reactor

1992-12-15

1994-10-18

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118723E, 118730, C23C 1650

Patent

active

053558324

ABSTRACT:
An apparatus adapted for depositing one or more polymeric materials on the surface of a substrate, which apparatus includes a polymerization chamber; an inlet for admitting a glow discharge polymerization precursor into the polymerization chamber; a first conductive member extending into the polymerization chamber; a first conductive support attached to the first conductive member for holding a substrate; a power generator arranged for transmitting electrical energy to the first conductive member; a second conductive member on or within the polymerization chamber, the second conductive member being spaced and insulated from the first conductive member; and a pump arranged for applying a vacuum to the polymerization chamber; whereby a glow discharge zone is established within the polymerization chamber when a vacuum is applied thereto and electrical energy from the first conductive member is received by the second conductive member. Also disclosed are a process of depositing polymeric materials on the surface of a substrate, which can be conveniently practiced using the above-described apparatus, and a product thereof.

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