Chemistry: electrical and wave energy – Processes and products – Processes of treating materials by wave energy
Patent
1974-12-03
1976-04-27
Bleutge, John C.
Chemistry: electrical and wave energy
Processes and products
Processes of treating materials by wave energy
96 351, 96115P, 20415915, 260875, 260879, 260881, 260884, 260885, 260886, 427 43, 427 44, 427 54, 428458, 428461, 428462, 428463, C08F 800, G03C 168
Patent
active
039533093
ABSTRACT:
A process for making photoresists which comprises preparing a photopolymerizable layer of an addition polymer, an initiator system, and a polymerizable inhibitor, using a preformed macromolecular binding agent which is a copolymer of a first monomeric material containing one or more non-acidic vinyl-type compounds and a second monomeric material containing one or more alpha,beta-unsaturated carboxyl-containing monomers, wherein the ratio of the first monomer to the unsaturated carboxylic-containing monomer is sufficient to render the binding agent soluble in a dilute alkaline solution; thereafter exposing a portion of the photopolymerizable layer to actinic light; and washing said layer with a dilute aqueous alkaline solution to dissolve the unexposed portion of the photopolymerizable layer. Preferably, the photopolymerizable layer is supported on a metallic substrate prior to said washing step.
REFERENCES:
patent: 2893868 (1959-07-01), Barney
patent: 3718473 (1971-01-01), Gervay et al.
patent: 3833384 (1974-09-01), Noonan et al.
patent: 3879204 (1975-04-01), Gervay
Beaupre Richard E.
Gilano Michael N.
Lipson Melvin A.
Bleutge John C.
Dynachem Corporation
Lewen Bert J.
Page Thurman K.
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