Polymerizable fluorinated ester, manufacturing method,...

Details Polymerizable fluorinated ester, manufacturing method,... Polymerizable fluorinated ester, manufacturing method,...

2007-04-10

2007-04-10

Choi, Ling-Sui (Department: 1713)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C526S245000, C526S319000, C560S205000, C560S219000

Reexamination Certificate

active

11175346

ABSTRACT:
Polymerizable fluorinated ester compounds having formula (1) or (2) are novel wherein R1is H, methyl or trifluoromethyl, R2is a divalent hydrocarbon group, R3is H or a monovalent hydrocarbon group, or R2and R3, taken together, may form a ring, R4is H, OH or a monovalent hydrocarbon group, and R5is an acid labile group. They are most useful as monomers to produce polymers for the manufacture of radiation-sensitive resist compositions

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