Polymerizable ester compounds

Details Polymerizable ester compounds Polymerizable ester compounds

2007-10-02

2007-10-02

Richter, Johann (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

C430S270100

Reexamination Certificate

active

11440107

ABSTRACT:
Ester compounds having formula (1) wherein R1is fluorine or C1-C10fluoroalkyl, R2is C1-C10alkylene or fluoroalkylene, and R3is an acid labile group are novel. They can be polymerized into polymers which are used to formulate resist compositions, which are processed by the lithography involving ArF exposure, offering many advantages including improved resolution and transparency, minimal line edge roughness, improved etch resistance, and especially minimal surface roughness after etching.

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