Stock material or miscellaneous articles – Structurally defined web or sheet – Continuous and nonuniform or irregular surface on layer or...
Patent
1994-07-12
1996-11-26
Watkins, III, William P.
Stock material or miscellaneous articles
Structurally defined web or sheet
Continuous and nonuniform or irregular surface on layer or...
428141, 428143, 428323, 428327, 428402, 4284231, 4284251, 4283135, 4283055, 428332, 428338, 428220, 428152, 428163, 428167, 428156, 428168, 4284088, 51296, 51298, 51302, 51303, 437225, 437228, 437946, 437974, 451527, 451530, B24B 3702, B24B 722
Patent
active
055783627
ABSTRACT:
The present invention relates to an article of manufacture or polishing pad for altering a surface of a workpiece, such as polishing or planarizing a semiconductor device. The article includes a polymeric matrix impregnated with a plurality of polymeric microelements, each polymeric microelement having a void space therein. The article has a work surface and a subsurface proximate to the work surface. When the article is in contact with a working environment, polymeric microelements at the work surface of the article are less rigid than polymeric elements embedded in the subsurface. As the work surface of the article is abraded during use, the work surface of the pad may be continuously regenerated. In alternative preferred embodiments, the work surface may further include a minitexture and/or a macrotexture. Preferably, the minitexture is formed by fractal patterning at least a portion of the work surface. The present invention also includes methods for decreasing the effective rigidity of polymeric microelements at the work surface of the article, regenerating the work surface of the article and planarizing a surface of a semiconductor device utilizing the article.
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Budinger William D.
Jensen Elmer W.
McClain Harry G.
Reinhardt Heinz F.
Roberts John V. H.
Rodel Inc.
Watkins III William P.
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