Polymeric inhibitors for enhanced planarization

Details Polymeric inhibitors for enhanced planarization Polymeric inhibitors for enhanced planarization

2007-12-25

2007-12-25

Norton, Nadine G. (Department: 1765)

Compositions

Etching or brightening compositions

C252S079400, C438S692000

Reexamination Certificate

active

11093806

ABSTRACT:
The invention provides a chemical-mechanical polishing system comprising a polishing component, a surfactant, and a liquid carrier. The invention further provides a method of chemically-mechanically polishing a substrate with the polishing system.

REFERENCES:
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5229393 (1993-07-01), Clough et al.
patent: 5308641 (1994-05-01), Cahalan et al.
patent: 5391636 (1995-02-01), Schilling
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5523379 (1996-06-01), Rosenquist
patent: 5609511 (1997-03-01), Moriyama et al.
patent: 5643046 (1997-07-01), Katakabe et al.
patent: 5650234 (1997-07-01), Dolence et al.
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5807963 (1998-09-01), Rosenquist
patent: 5838447 (1998-11-01), Hiyama et al.
patent: 5872165 (1999-02-01), Oberg et al.
patent: 5872633 (1999-02-01), Holzapfel et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5900487 (1999-05-01), Rosenquist
patent: 5919891 (1999-07-01), Rosenquist
patent: 5949927 (1999-09-01), Tang
patent: 5962558 (1999-10-01), Rosenquist
patent: 5964643 (1999-10-01), Birang et al.
patent: 6147163 (2000-11-01), Boisseau et al.
patent: 6166148 (2000-12-01), Ohrbom et al.
patent: 6180240 (2001-01-01), St. Aubin et al.
patent: 6375693 (2002-04-01), Cote et al.
patent: 6379223 (2002-04-01), Sun et al.
patent: 6447563 (2002-09-01), Mahulikar
patent: 6561883 (2003-05-01), Kondo et al.
patent: 6562719 (2003-05-01), Kondo et al.
patent: 6585568 (2003-07-01), Tsuchiya et al.
patent: 6632259 (2003-10-01), Weinstein et al.
patent: 6646082 (2003-11-01), Ghosh et al.
patent: 6774238 (2004-08-01), Pastor et al.
patent: 6821897 (2004-11-01), Schroeder et al.
patent: 2003/0168343 (2003-09-01), Commander et al.
patent: 2004/0162011 (2004-08-01), Konno et al.
patent: 2005/0005525 (2005-01-01), Yuzhuo et al.
patent: 2005/0031789 (2005-02-01), Liu et al.
patent: 2005/0227451 (2005-10-01), Konno et al.
patent: 2005/0282391 (2005-12-01), Vacassy
patent: 03-322771 (2002-09-01), None
patent: WO 98/27146 (1998-06-01), None
patent: WO 98/27168 (1998-06-01), None
patent: WO 2005/047410 (2005-05-01), None
Carpio et al.,Thin Solid Films, 266(2), 238-244 (1995).
Dabak et al.,Heterocyclic Communications, 8(1), 61-64 (2002).
Gutmann et al.,Thin Solid Films, 270(1-2), 596-600 (1995).
Kumar et al.,Advanced Metallization For Future ULSI, 427, 237-242 (1996).
Luo et al.,Langmuir, The ACS Journal of Surfaces and Colloids, 12(15), 3563-3566 (1996).

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