Polymeric dyes for antireflective coatings

Details Polymeric dyes for antireflective coatings Polymeric dyes for antireflective coatings

1993-12-16

1998-03-24

Woodward, Ana

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

5253274, C08F 832, C08F 2204

Patent

active

057313857

ABSTRACT:
A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.

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