Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Patent
1995-06-06
1997-08-05
Morris, Terrel
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Mixing of two or more solid polymers; mixing of solid...
4302701, 4302721, 430323, 522904, 5253275, G03C 1492, G03C 1494, C08F 2008
Patent
active
056543760
ABSTRACT:
A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.
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Knors Christopher John
Macy Elwood Herbert
Moreau Wayne Martin
Crockatt Dale M.
International Business Machines - Corporation
Morris Terrel
Soucar Steven J.
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