Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Reexamination Certificate
2005-09-07
2009-11-03
Lipman, Bernard (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Mixing of two or more solid polymers; mixing of solid...
C525S338000, C525S339000, C525S342000
Reexamination Certificate
active
07612146
ABSTRACT:
The present invention relates to polycyclic polymers, methods for producing polycyclic polymers, and methods for their use as photoresists in the manufacture of integrated circuits. In one embodiment, the present invention relates to photoresist compositions formed from the polymerization of at least one halogenated polycyclic monomer or hydrohalogenated polycyclic monomer. In another embodiment, the present invention relates to photoresist compositions formed from the co-polymerization of at least one halogenated polycyclic monomer or hydrohalogenated polycyclic monomer with at least one non-halogenated polycyclic monomer.
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Bennett Brian
Boyd Edwin P.
Langsdorf Leah J.
Rhodes Larry F.
Sobek Andrew A.
Berman Bernard
Lipman Bernard
Sumitomo Bakelite Co. Ltd.
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