Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Patent
1994-03-04
1997-01-28
Clark, W. Robinson H.
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Mixing of two or more solid polymers; mixing of solid...
525451, 525502, 525508, C08L 6110, C08L 3312
Patent
active
055978681
ABSTRACT:
Anti-reflective coatings and methods for forming these anti-reflective coatings are disclosed that have a polymer chemistry and optical characteristics suitable for suppressing the light that reflects off a circuit substrate during a photolithographic process. These anti-reflective coatings include a phenolic polymer material and an epoxide-containing polymer material that can be combined in a select proportion to form a thermally curable polymeric anti-reflective coating. The select proportions of the combined materials tailors the optical characteristic of the anti-reflective coating to attenuate energy about a select range of wavelengths.
REFERENCES:
patent: 4491628 (1985-01-01), Ito et al.
patent: 4910122 (1990-03-01), Arnold et al.
patent: 5045431 (1991-09-01), Allen et al.
patent: 5071730 (1991-12-01), Allen et al.
patent: 5190992 (1993-03-01), Kato et al.
Yen et al., "An Anti-Reflective Coating for Use with PMMA at 193 nm", J. Electrochem Soc., vol. 139, No. 2, pp. 616-619 (1992).
Horn, "Antireflection Layers and Planarization for Microlithography", Solid State Technology, pp. 57-62 (1991).
"A New Multifunctional Coating that Replaces Adhesion Promoter, Anti-reflective Coating and Release Layer with One Easy to Apply Coat for Photolithography", Brewer Science, Inc.
Clark W. Robinson H.
Engellenner Thomas J.
Massachusetts Institute of Technology
LandOfFree
Polymeric anti-reflective compounds does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Polymeric anti-reflective compounds, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polymeric anti-reflective compounds will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-941927