Polymer NEMS for cell physiology and microfabricated cell...

Details Polymer NEMS for cell physiology and microfabricated cell... Polymer NEMS for cell physiology and microfabricated cell...

2011-06-28

2011-06-28

Caputo, Lisa M (Department: 2855)

Measuring and testing

Dynamometers

Responsive to force

C435S287100, C977S724000, C977S956000, C977S958000

Reexamination Certificate

active

07966898

ABSTRACT:
A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

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