Polymer membranes for X-ray masks

Details Polymer membranes for X-ray masks Polymer membranes for X-ray masks

1979-11-13

1981-01-20

Hoag, W. E.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156247, 156631, 156668, 264259, 264299, 264334, 264340, B29D 702, B29D 720

Patent

active

042460549

ABSTRACT:
Polymer membranes are formed by spinning a monomer solution on a smooth surface of a plate and heat curing the solution to form a polymer film. A carrier element is attached to the film and together they are immersed in a suitable chemical composition to react with the bond between the film and plate. The assembly is then immersed in water to cause the plate to fall away from the film.

REFERENCES:
patent: 3607997 (1971-09-01), Linturn
patent: 3742229 (1973-06-01), Smith et al.
patent: 3892973 (1975-07-01), Coquin et al.
patent: 4170512 (1979-10-01), Flanders et al.

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