Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Patent
1995-03-16
1996-07-30
Hamilton, Cynthia
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Mixing of two or more solid polymers; mixing of solid...
525353, 5253335, 525505, 430192, 4302701, 430905, 522126, C08F 834, G03F 7038
Patent
active
055412637
ABSTRACT:
An alkali soluble resin, preferably a phenolic resin, having a portion of its phenolic hydroxyl groups reacted to form a blocking group inert to acid or base. The polymer is used for the formulation of acid hardening photoresists and the presence of the inert blocking group enables development of an exposed photoresist with a strong developer without formation of microbridges between fine line features.
REFERENCES:
patent: 3716521 (1973-02-01), Economy et al.
patent: 4564575 (1986-01-01), Perreault et al.
patent: 5128232 (1992-07-01), Thackeray et al.
patent: 5239015 (1993-08-01), Sheehan et al.
patent: 5362600 (1994-11-01), Sinta et al.
Ablaza Sheri L.
Denison Mark D.
Orsula George W.
Sinta Roger
Thackeray James W.
Goldberg Robert L.
Hamilton Cynthia
Shipley Company L.L.C.
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