Polymer for positive acid catalyzed resists

Details Polymer for positive acid catalyzed resists Polymer for positive acid catalyzed resists

1995-05-09

1998-03-24

Lipman, Bernard

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

5253288, 525386, C08F 814

Patent

active

057313865

ABSTRACT:
The invention comprises a polymer formulated for an acid hardened resist system. The polymer is one having acid labile blocking groups and inert blocking groups. The photoresist comprises the polymer and a photoacid generator. The inclusion of inert blocking groups on the resin improves shelf life without deleteriously affecting photolithographic properties of the resist.

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