Polymer for organic anti-reflective coating layer and...

Details Polymer for organic anti-reflective coating layer and... Polymer for organic anti-reflective coating layer and...

2007-12-07

2010-11-09

Hamilton, Cynthia (Department: 1795)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

C430S272100, C430S313000, C430S271100, C438S952000

Reexamination Certificate

active

07829650

ABSTRACT:
A polymer which has siloxane group at a main chain thereof and a composition including the same, for forming an organic anti-reflective coating layer are disclosed. The polymer for forming an organic anti-reflective coating layer is represented by following Formula.In Formula, R is hydrogen atom, C1˜C20alkyl group, C1˜C10alcohol group or epoxy group, R1is independently hydrogen atom,n is an integer of 1-50, R2is C1˜C20alkyl group, C3˜C20cycloalkyl group, C6˜C20aryl group or C7˜C12arylalkyl group, R3is hydrogen atom, C1˜C10alcohol group or epoxy group and POSS is a polyhedral oligosilsesquioxane.

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