Polymer for forming anti-reflective coating layer

Details Polymer for forming anti-reflective coating layer Polymer for forming anti-reflective coating layer

2007-10-16

2007-10-16

Szekely, Peter (Department: 1714)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

C528S365000, C528S366000, C430S270100, C430S311000

Reexamination Certificate

active

11366765

ABSTRACT:
A polymer for forming an organic anti-reflective coating layer between an etching layer and a photoresist layer to absorb an exposure light in a photolithography process and a composition comprising the same are disclosed. The polymer for forming an organic anti-reflective coating layer has repeating units represented bywherein, R is a substituted or non-substituted alky group of C1 to C5.

REFERENCES:
patent: 2006/0134558 (2006-06-01), Kim et al.
patent: 2006/0199106 (2006-09-01), Kim et al.
patent: 2006/0199107 (2006-09-01), Kim et al.

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