Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
Reexamination Certificate
2007-05-22
2007-05-22
Harlan, Robert D. (Department: 1713)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Polymers from only ethylenic monomers or processes of...
C526S281000, C526S285000, C427S489000, C427S491000, C427S515000, C427S535000, C427S574000
Reexamination Certificate
active
11153604
ABSTRACT:
A polymer film having a low dielectric constant is produced polymerizing a raw material gas containing a compound of the formula (1):wherein PCA represents a polycycloaliphatic hydrocarbon group, ALK represents a divalent aliphatic hydrocarbon group, m is 1 or 2, n is 0 or 1, and R1 and R2 represent independently each other an alkyl group, an alkenyl group, an alkynyl group, an alkoxy group, an aryl group or an aryloxy group by a plasma polymerization method.
REFERENCES:
patent: 2000-012532 (2000-01-01), None
patent: 2000-12532 (2000-01-01), None
patent: 3190886 (2001-05-01), None
Kawahara Jun
Kinoshita Keizo
Kunimi Nobutaka
Nakano Akinori
ASM Japan K.K.
Harlan Robert D.
NEC Corporation
Sumitomo Chemical Company Limited
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