Polymer-coated particles for chemical mechanical polishing

Details Polymer-coated particles for chemical mechanical polishing Polymer-coated particles for chemical mechanical polishing

2007-02-27

2007-02-27

Marcheschi, Michael (Department: 1755)

Abrasive tool making process, material, or composition

With inorganic material

C051S308000, C051S309000, C051S298000, C106S003000

Reexamination Certificate

active

10903425

ABSTRACT:
The polishing composition is suitable for chemical mechanical polishing magnetic, optical, semiconductor or silicon substrates. The polishing composition includes abrasive particles in a liquid media. The abrasive particles have a particle core, the particle core having a hardness and a polymeric shell physisorbed to and encapsulating the particle core. The polymeric shell has a solid structure and a hardness lower than the hardness of the particle core. The abrasive particles have an average particle size of less than or equal to about 2 micrometers dispersed in the liquid media.

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