Polymer carrier gears for polishing of flat objects

Details Polymer carrier gears for polishing of flat objects Polymer carrier gears for polishing of flat objects

1997-05-01

1999-03-16

Morgan, Eileen P.

Abrading

Abrading process

Glass or stone abrading

451285, 451288, 451398, B24B 722

Patent

active

058822453

ABSTRACT:
A carrier is comprised of a thermoplastic polymer such as polyetheretherketone which is formed or fabricated as a uniform thickness, double sided flat sheet of material with wafer passages therethrough and gear teeth formed or fabricated around the peripheral edge thereof so as to be cooperative with a wafer polishing machine. An extrusion or rolling or calendering process provides a flat carrier which is, optionally, coated with thermoset polymer or thermoplastic film.

REFERENCES:
patent: 4104099 (1978-08-01), Scherrer
patent: 4239567 (1980-12-01), Winings
patent: 4512113 (1985-04-01), Budinger
patent: 5085009 (1992-02-01), Kinumura et al.
patent: 5149158 (1992-09-01), Molinaro et al.
patent: 5193316 (1993-03-01), Olmstead
patent: 5274960 (1994-01-01), Karlsrud
patent: 5329732 (1994-07-01), Karlsrud et al.

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