Polymer bulk acoustic resonator

Details Polymer bulk acoustic resonator Polymer bulk acoustic resonator

2008-04-22

2008-04-22

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S800000

Reexamination Certificate

active

11381551

ABSTRACT:
A polymer bulk acoustic resonator that includes an active semiconductor layer, a first thin film electrode layer applied to the semiconductor layer, a thin film electro-active polymer layer applied to the first thin film electrode layer; and a second thin film electrode layer applied to the thin film electro-active polymer layer.

REFERENCES:
patent: 5160870 (1992-11-01), Carson et al.
patent: 6182619 (2001-02-01), Spitzer et al.
patent: 6839946 (2005-01-01), Ylilammi et al.
patent: 2001/0017504 (2001-08-01), Aigner et al.
patent: 2006/0164186 (2006-07-01), Stoemmer et al.
patent: 2006/0202779 (2006-09-01), Fazzio et al.
patent: WO/98/16957 (1998-04-01), None

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